会所铜艺楼梯扶手纯铜雕花楼梯护栏加工价格

时间：2021-04-13

有更多的技术及应用需求请联系公司销售工程师:欧玉涛  137-1885-8581
Air-Bearing Rotary Stage
Aerotech’s ABR1000 rotary air-bearing stage provides
superior angular positioning, velocity stability, and error
motion performance. It is designed to meet the exacting
requirements for wafer inspection, DVD mastering, disk
drive test and servo writing, optical inspection and
fabrication, and MEMS/nanotechnology device fabrication.
Superior Mechanical Design
The ABR1000 is designed with large air-bearing surfaces
for high stiffness and load capacity in a low profile design.
This design produces not only excellent axial and radial
error motions, but outstanding tilt error motion, as well.
The resultant face error motion is significantly better than
other rotary air-bearing tables and spindles in the
marketplace, greatly benefiting applications requiring
exceptional planar performance.
Brushless Direct-Drive
To maximize positioning performance, the ABR1000
utilizes Aerotech’s S-series slotless, brushless motor. This
motor represents the latest in rotary motor technology. The
motor uses an advanced magnetic circuit design to produce
Direct-drive slotless brushless servomotor
Zero cogging motor for outstanding velocity
stability
Outstanding error motion and wobble
performance
Direct coupled, high accuracy rotary encoder
No mechanical contact
Wafer and disk accessories available
high torque output with minimal heat generation. The
slotless design is inherently zero-cogging and torque ripplefree.
This makes the ABR1000 ideal for applications
requiring smooth scan velocities at low or high speeds.
Accurate Positioning
Several feedback options are available. The encoders
selected for this stage series are noncontacting, reflective,
or interferential encoders. When coupled with Aerotech’s
feedback multipliers and controls, resolutions of <0.03 arc
second and positioning accuracy of <1 arc second is
available.
Flexible Configurations
Options include integral wafer chucks, disk chucks and
clamps, ESD versions, and rotary unions for air/vacuum
service.
Custom Designs
Custom versions of the ABR1000 are available for rate
table and inertial guidance test-stand applications.

18688805750

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